1st and 2nd Step Glass Polishing
Cabot Microelectronics' 1st and 2nd step glass slurry offerings consist of ceria & non-ceria based formulations to planarize glass substrates. These formulations meet stringent polish requirements to provide ultra low surface roughness and low defects. Our glass slurries give excellent cleanability on post polish glass surfaces.
The table below compares the performance of our products for 1st and 2nd Step Glass polishing.
Lustra G1000 Series |
Lustra G2000 Series |
|
Particles System |
Ceria/Non-Ceria Based | Colloidal Silica-based |
Removal Rate |
High | High |
Surface Physical Properties |
Excellent | Excellent |
CMC in Solid State Magazine
CMC chosen by Solid State magazine for November 2010 feature article.
Click here to read the article.