2nd Step Glass

CMP Corporation - CMP Manufacturing

2nd Step Glass Polishing

Cabot Microelectronics' 2nd step glass slurry offerings consist of colloidal silica based formulations to planarize glass substrates.  These formulations meet stringent polish requirements to provide ultra low surface roughness and low defects.  Our glass slurries give excellent cleanability on post polish glass surfaces.

The table below compares the performance of our products for 2nd Step Glass polishing.

 

 

CMC Lustra G2000 2nd Step Glass Rigid Disk Data Storage CMP SlurryLustraâ„¢ G2000 Series

Particles System

Colloidal Silica-based

Removal Rate

High

Surface Physical Properties

Excellent

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

CMC in Solid State Magazine

Chemical Mechanical Planarization For Metal-gate Integration

CMC's "CMP For Metal-gate Integration" article in Solid State magazine.

For over twenty years of IC manufacturing, the creation of planar device structures has required the use of technologies to reduce topographic variation. Chemical mechanical planarization (CMP) - pressing wafers into rotating pads in the presence of special slurry blends to produce removal through chemically amplified nano-scale abrasion - has become a critical part of modern IC fabrication. Click here to read the full article.