Barrier Slurries

As barrier CMP focus shifts away from early process development to yield enhancement and cost-of-ownership reduction, polishing slurries assume a critical role, influencing both performance and total system cost. Our new line of Sentinel™ slurries for barrier applications is low-k compatible and designed to meet broad technical requirements.

Click on one of our products below to learn more.

Click to view more information on our next generation of barrier slurries: 

Sentinel B9000 Series Barrier Slurry