Copper Slurries

As the leading supplier of copper CMP slurries, Cabot Microelectronics is focused on developing products with yield enhancement and cost-of-ownership reduction.  Our copper CMP polishing slurries assume a critical role, influencing both performance and total system cost. Our next-generation EPOCH^® line of copper slurries provides maximum flexibility to meet specific customer integration requirements.   

Click on one of our products below to learn more.