Epic® D200 Series CMP Polishing Pads
Product Summary
The Epic D200 Series CMP Polishing Pads are based on Cabot Microelectronics' solid state foaming technology designed to provide ultra low defectivity performance while maintaining longer pad life for advanced applications.
The Epic D200 platform is unique in that it allows CMC to tune the hardness, porosity and pore size of the pad, so that it can be optimized for our customers' unique polishing needs.
Epic D200 Series CMP Polishing Pads are in development and available for sampling to select customers only.
Contact CMC for more information on our Epic D200 Series CMP Polishing Pads.
CMC in Solid State Magazine
CMC chosen by Solid State magazine for November 2010 feature article.
Click here to read the article.