EPOCH^® C8000 Series Copper Slurry

Product Summary

The EPOCH C8000 Series is Cabot Microelectronics' new low-cost offering for copper polishing. It's formulated to provide high throughput at lower down force, world-class planarization efficiency and excellent over-polish control.

Low Cost of Ownership

Formulated as a 10X concentrated slurry to reduce shipping and handling cost and to achieve lower point-of-use cost.

Improved Product Yield

Excellent cleanablility, high-purity particle and ability to use this platform at a low down force (while maintaining high throughput) results in significantly lower defectivity and better product yield.

Broad Technology Node Application

Tunable dishing performance and excellent over-polish window allows this to meet the performance requirements for a broad range of technology nodes.

Ease of Use

Colloidally stable formulation that is easy to mix and handle.