EPOCH® EPL 2361 Copper Slurry
Product Summary
EPOCH EPL 2361 is Cabot Microelectronics' low-defect offering for copper polishing. It provides a wide over-polishing window and optimized removal rates for copper with low defectivity.
Improved Product Yield
Formulated to achieve lower defectivity resulting in better product yield.
Robust Process Control
Formulated with high planarization efficiency and high selectivity to barrier, this product has excellent control and robust over-polish window.
Ease of Use
Colloidally stable formulation that is easy to mix and handle.
CMC in Solid State Magazine
CMC chosen by Solid State magazine for November 2010 feature article.
Click here to read the article.