i-Cue^® B7000 Barrier Slurry

Product Summary

i-Cue B7000 is Cabot Microelectronics' low-k compatible copper barrier polishing slurry. It provides minimal k-shift, optimized Rs performance, excellent topography correction capability and low defectivity with high oxide rate at low downforce. 

Improved Product Yield

Formulated to achieve lower defectivity and excellent topography correction for better product yield.

Robust Process Window

Tunable selectivity among copper, barrier, oxide/low-k results in excellent control and robust over-polish window.

Broad Technology Node Application

Optimized Rs performance to meet the requirements of a broad range of applications nodes.