i-Cue™ B7000 Series Barrier Slurry
i-Cue B7000 Series is Cabot Microelectronics' low-k compatible copper barrier polishing slurry. It provides minimal k-shift, optimized Rs performance, excellent topography correction capability and low defectivity with high oxide rate at low downforce.
Features & Benefits
Improved Product Yield
Formulated to achieve lower defectivity and excellent topography correction for better product yield.
Robust Process Window
Tunable selectivity among copper, barrier, oxide/low-k results in excellent control and robust over-polish window.
Broad Technology Node Application
Optimized Rs performance to meet the requirements of a broad range of applications nodes.