i-Cue^® C7092 Copper Slurry

Product Summary

i-Cue C7092 is Cabot Microelectronics' low-cost offering for copper polishing. It combines a balanced approach of chemical and mechanical performance to provide high planarization efficiency and lower defectivity.

Low Cost of Ownership

Formulated as a 4X concentrated slurry to reduce shipping and handling cost and to achieve lower point-of-use cost.

Broad Technology Node Application

Excellent planarization that meets the performance requirements for 130nm to 45nm technology nodes.

Robust Process Control

Formulated with high selectivity to barrier, this product has excellent control and robust over-polish window.

Improved Product Yield

Lower dishing and erosion from this product results in better product yield.