iDIEL® D3500/D4500 Series Slurries
Product Summary
iDIEL D3500/D4500 Series is our next generation of fumed silica products. It incorporates enhancements in silica and dispersion process to reduce defects and trace metals and improve slurry stability.
Improved Product Robustness
- Lower LPC and trace metal levels resulting in significantly lower defects and better product yield
- Formulated with enhanced fumed silica particles, to improve lot to lot variability, product quality and stability
Robust Alternative for ILD Applications
- Alternative family of fumed silica products for ILD applications. Removal rate and non-uniformity are comparable to SS25E with improved defectivity and robustness
Ease of Use
- Colloidally stable formulation that is easy to dilute, mix, filter and handle
CMC in Solid State Magazine
CMC chosen by Solid State magazine for November 2010 feature article.
Click here to read the article.
iDIEL® D7200 Series
iDIEL D7200 Series is Cabot Microelectronics' new offering for bulk oxide polishing.
- Ultra Low Defectivity
- High Removal Rate
- Excellent Uniformity
- High Purity Engineered Ceria Particles
- Shear Tolerant
Learn more about the iDIEL D7200 Series