iDIEL D3500/D4500 Series is our next generation of fumed silica products. It incorporates enhancements in silica and dispersion process to reduce defects and trace metals and improve slurry stability.
CMC's "CMP For Metal-gate Integration" article in Solid State magazine.
For over twenty years of IC manufacturing, the creation of planar device structures has required the use of technologies to reduce topographic variation. Chemical mechanical planarization (CMP) - pressing wafers into rotating pads in the presence of special slurry blends to produce removal through chemically amplified nano-scale abrasion - has become a critical part of modern IC fabrication. Click here to read the full article.
iDIEL D7200 Series is Cabot Microelectronics' new offering for bulk oxide polishing.