iDIEL™ D7200 Series Slurries
iDIEL D7200 Series is Cabot Microelectronics' new ultra low defect offering for bulk oxide polishing. It's a high-purity concentrated slurry, made with engineered ceria particles, formulated for improved defectivity, high-removal rate, excellent uniformity and reduction in slurry cost.
Features & Benefits
Improvement in Product Yield
- >50% reduction in scratch defectivity as compared to fumed silica.
- Specially formulated to achieve lower defectivity at lower downforce, resulting in better product yield.
Lower Cost of Ownership
- Equivalent or higher removal rate (at lower downforce) than fumed silica products.
- Formulated at a 5-10X concentrated slurry to reduce shipping and handling cost and to achieve lower point-of-use cost.