iDIEL^® D7200 Series Slurries

Product Summary

iDIEL D7200 Series is Cabot Microelectronics' new ultra low defect offering for bulk oxide polishing. It's a high-purity concentrated slurry, made with engineered ceria particles, formulated for improved defectivity, high-removal rate, excellent uniformity and reduction in slurry cost.

Improvement in Product Yield

• >50% reduction in scratch defectivity as compared to fumed silica.
• Specially formulated to achieve lower defectivity at lower downforce, resulting in better product yield.

Lower Cost of Ownership

• Equivalent or higher removal rate (at lower downforce) than fumed silica products.
• Formulated at a 5-10X concentrated slurry to reduce shipping and handling cost and to achieve lower point-of-use cost.