CMP Corporation - CMP Manufacturing

iDIEL™ D7200 Series Slurries

CMC D7200 Bulk Oxide iDiel Dielectric CMP Slurry

Product Summary

iDIEL D7200 Series is Cabot Microelectronics' new ultra low defect offering for bulk oxide polishing. It's a high-purity concentrated slurry, made with engineered ceria particles, formulated for improved defectivity, high-removal rate, excellent uniformity and reduction in slurry cost. 


Features & Benefits

Improvement in Product Yield

  • >50% reduction in scratch defectivity as compared to fumed silica.
  • Specially formulated to achieve lower defectivity at lower downforce, resulting in better product yield.

Lower Cost of Ownership

  • Equivalent or higher removal rate (at lower downforce) than fumed silica products.
  • Formulated at a 5-10X concentrated slurry to reduce shipping and handling cost and to achieve lower point-of-use cost.


Semi-SperseTM W2000


Semi Sperse w2000 Tungsten Slurry

Thank You for Choosing Semi-Sperse W2000 Tungsten Slurry

Cabot Microelectronics trusted for over 200 million liters of Semi-Sperse W2000 tungsten slurry provided to the semiconductor industry. We've reached this significant milestone because of our customers' confidence in CMC as the industry leader in tungsten polishing solutions.

>> Learn More about Semi-Sperse W2000