iDIEL^® D8100 Slurry

Product Summary

iDIEL D8100 is a dielectric polishing slurry formulated to provide superior polishing performance.  Unique chemistry and ceria abrasive technologies have been engineered to provide ultra-low defect performance.  D8100 can be extended to DSTI applications with use of Cabot Microelectronics' proprietary self-stop additive (D8100-B10) to offer superior planarization. 

Improved Scratch Performance

• Formulated at low solids and engineered ceria particles with rounded corner morphology resulting in significantly lower scratch defects and better product yield.

Robust Process Control

• Self-stopping mechanism stops polishing upon planarization, resulting in excellent final planarity and minimal oxide loss.

Tunable Slurry for Multi-application Use                   

• Additive component can be varied at point of use to tune planarization performance to meet specific integration designs.
• Excellent for use in multiple dielectric CMP applications where self-stopping capability is required for superior planarization performance. Capability of polishing multiple dielectric materials: PETEOS, BPSG, PSG, HDP.

Ease of Use

• Easy to handle, no additional mixing required once in SDS and recirculated. Mixing required prior to transfer to SDS.