NOVUS^™ A7000 Series Aluminum Slurry

Product Summary

NOVUS A7000 Series is Cabot Microelectronics' high throughput and low-defect slurry offering for aluminum polishing. It provides high aluminum rate with excellent dishing and erosion performance.

Low Cost of Ownership

Formulated with a high aluminum removal rate resulting in better throughput and lower cost of ownership.

Improved Product Yield

Specially formulated with treated particles to achieve lower defectivity resulting in higher product yield.

Robust Process Control

High selectivity to oxide with good uniformity, excellent dishing and erosion and robust over-polish window.