NOVUS™ GST 2000 Series GST Slurry
Product Summary
NOVUS GST 2000 Series is Cabot Microelectronics' high-throughput and low-defect slurry offering for GST polishing. GST 2000 provides high selectivity to oxide and GST 2100 provides non-selectivity to oxide. Both slurries provide low defectivity including no GST film delamination and no GST composition change.
Competitive Cost of Ownership
High throughput and low point-of-use cost results in an overall competitive cost of ownership for customers.
Improved Product Yield
Formulated to achieve lower defectivity resulting in higher product yield.
Robust Product & Process Control
Formulated to have no GST composition change and no film delamination.
CMC in Solid State Magazine
CMC chosen by Solid State magazine for November 2010 feature article.
Click here to read the article.