On-Site Polishing Services

On-Site Polishing Services

Cabot Microelectronics is pleased to offer contract wafer polishing services. We provide high precision Chemical Mechanical Planarization on wafers from 50 to 100 mm in diameter for all crystal faces of interest. Rapid prototyping as well as large volumes are well within our capability. Current HVM capacity is serviced on a 30" single side polisher with the following capacity:

  • 2" or 50 mm wafers 1600 per month
  • 3" or 76 mm wafers 1200 per month
  • 4" or 100 mm wafers 1000 per month

Wafers are polished to your specifications then cleaned and inspected prior to packaging. Our typical inspection equipment is listed below.

Nanoscale Metrology Services

Including the following measurement and analysis with:

  • Scanning Electron Microscopy (SEM)
  • Atomic Force Microscopy (AFM)
  • Candela optical surface analyzer
  • Wyko white light interferometer
  • Additional capabilities for measuring Surface and Embedded Defects, Surface Accuracies, Surface Roughness and more

CMC OnSite_Polishing_Services

CMC in Solid State Magazine

Chemical Mechanical Planarization For Metal-gate Integration

CMC's "CMP For Metal-gate Integration" article in Solid State magazine.

For over twenty years of IC manufacturing, the creation of planar device structures has required the use of technologies to reduce topographic variation. Chemical mechanical planarization (CMP) - pressing wafers into rotating pads in the presence of special slurry blends to produce removal through chemically amplified nano-scale abrasion - has become a critical part of modern IC fabrication. Click here to read the full article.