Semi-Sperse® 25 and 12 Series Slurries
Product Summary
The Semi-Sperse 25 and Semi-Sperse 12 Series are production-proven fumed silica based slurries used in high-volume manufacturing. It is the highest volume production of any commercial CMP slurry in the world and is used in inter-layer dielectric (ILD), pre-metal dielectric (PMD), polysilicon, indirect shallow trench isolation (STI), and other specialty oxide CMP applications for technology nodes from 250nm to 45nm. Our Semi-Sperse family offers a variety of products, each targeted to meet specific customer needs such as low defectivity, concentrates and high-purity.
Available as Ready to Use or Concentrate
- Semi-Sperse 25 formulated as a 2X concentrated slurry to reduce shipping and handling costs.
World-Class Supply Assurance
- Highest volume production of any commercial CMP slurry in the world.
- Over 10 years in production with consistent performance.
Ease of Use
- Colloidally stable formulation that is easy to dilute, mix, filter and handle.
- Has an extended pot life and shelf life.
CMC in Solid State Magazine
CMC chosen by Solid State magazine for November 2010 feature article.
Click here to read the article.
iDIEL® D7200 Series
iDIEL D7200 Series is Cabot Microelectronics' new offering for bulk oxide polishing.
- Ultra Low Defectivity
- High Removal Rate
- Excellent Uniformity
- High Purity Engineered Ceria Particles
- Shear Tolerant
Learn more about the iDIEL D7200 Series