Semi-Sperse® P1000 Slurry
Product Summary
Semi-Sperse P1000 is an easy-to-use, high-purity, ready-to-use polysilicon polishing slurry. P1000 provides high polysilicon rate with high selectivity, good planarity and low defectivity.
Ease of Use
- Easy-to-use, high-purity, ready-to-use polysilicon polishing slurry.
- Long shelf life (12 months) and excellent colloidal stability.
Superior Performance
- Provides high polysilicon rate with good planarity and low defectivity.
- Excellent stopping ability on SiO2 and nitride.
CMC in Solid State Magazine
CMC chosen by Solid State magazine for November 2010 feature article.
Click here to read the article.
iDIEL® D7200 Series
iDIEL D7200 Series is Cabot Microelectronics' new offering for bulk oxide polishing.
- Ultra Low Defectivity
- High Removal Rate
- Excellent Uniformity
- High Purity Engineered Ceria Particles
- Shear Tolerant
Learn more about the iDIEL D7200 Series