Semi-Sperse^® W2000 Series Slurries

Product Summary

Semi-Sperse W2000 Series is the industry benchmark for tungsten CMP. This production-proven, selective tungsten slurry is a high-purity slurry based on fumed silica and hydrogen peroxide technology.

For advanced tungsten applications requiring a selective approach, CMC is currently recommending WIN W7000 slurry.

Improvement in Product Yield

• Specially formulated high-purity slurry to achieve lower defectivity and excellent cleanability resulting in better product yield.

Lower Cost-of-Ownership

• Formulated as a 2x concentrated slurry to reduce shipping and handling cost and to achieve lower point-of-use cost.

Ease of Use

• Colloidally stable formulation that is easy to mix, filter and handle.