Semi-Sperse® W2585 Slurry
Product Summary
Semi-Sperse W2585 is a selective, high-purity slurry based on fumed silica and hydrogen peroxide technology. It provides improved planarity on tungsten applications requiring soft dielectrics.
For advanced tungsten applications requiring a selective approach, CMC is currently recommending WIN W7000 slurry.
Improvement in Product Yield
- Specially formulated high-purity slurry to achieve lower defectivity and excellent cleanability resulting in better product yield.
- 50% reduction in erosion on soft dielectric (as compared to W2000) and reduced keyholing.
Ease of Use
- Colloidally stable formulation that is easy to mix, filter and handle.
CMC in Solid State Magazine
CMC chosen by Solid State magazine for November 2010 feature article.
Click here to read the article.