Wafer CMP Polishing

 

Semi-Sperseā„¢ W2585 Slurry

CMC W2585 for TungstenSelective

 Product Summary

Semi-Sperse W2585 is a selective, high-purity slurry based on fumed silica and hydrogen peroxide technology. It provides improved planarity on tungsten applications requiring soft dielectrics.

 

Features & Benefits

Improvement in Product Yield

Ease of Use