Semi-Sperse™ W2585 Slurry
Semi-Sperse W2585 is a selective, high-purity slurry based on fumed silica and hydrogen peroxide technology. It provides improved planarity on tungsten applications requiring soft dielectrics.
Features & Benefits
Improvement in Product Yield
- Specially formulated high-purity slurry to achieve lower defectivity and excellent cleanability resulting in better product yield.
- 50% reduction in erosion on soft dielectric (as compared to W2000) and reduced keyholing.
Ease of Use
- Colloidally stable formulation that is easy to mix, filter and handle.