Sentinel™ B9000 Series Ruthenium Barrier Slurry
Product Summary
Sentinel B9000 Series is Cabot Microelectronics' newest Ruthenium CMP slurry. It provides high to medium selectivity of CVD/ALD deposited ruthenium to oxide without any galvanic corrosion. This formulation is compatible with copper and tantalum.
Compatible to Other Metals
Compatible to copper and tantalum with no corrosion.
Competitive Cost of Ownership
High ruthenium removal rate results in higher through-put and lower cost of ownership.
Tunable Slurry for Multi-application Use
Removal rate of ULK can be adjusted from moderate to low by proprietary additives to meet specific integration designs. Can be used for stop-on low-k or stop-in low-k application.
Ease of Use
Colloidal stable formulation that is easy to mix and handle.
CMC in Solid State Magazine
CMC chosen by Solid State magazine for November 2010 feature article.
Click here to read the article.