Sentinel™ B9000 Series Ruthenium Barrier Slurry
Sentinel B9000 Series is Cabot Microelectronics' newest Ruthenium CMP slurry. It provides high to medium selectivity of CVD/ALD deposited ruthenium to oxide without any galvanic corrosion. This formulation is compatible with copper and tantalum.
Features & Benefits
Compatible to Other Metals
Compatible to copper and tantalum with no corrosion.
Competitive Cost of Ownership
High ruthenium removal rate results in higher through-put and lower cost of ownership.
Tunable Slurry for Multi-application Use
Removal rate of ULK can be adjusted from moderate to low by proprietary additives to meet specific integration designs. Can be used for stop-on low-k or stop-in low-k application.
Ease of Use
Colloidal stable formulation that is easy to mix and handle.