SiCceed 1000 A/B Silicon Carbide Slurry

Product Summary

SiCceed 1000 A/B Series is Cabot Microelectronics new 2-component single crystal Silicon Carbide Wafer CMP slurries. They are high purity metal oxide formulations designed for very high removal rate, superior surface quality, and excellent cost of ownership.

Lower Cost of Ownership

• Formulated as ready to use slurry after mixing Component A and Component B in equal portions
• Very high removal rate providing increased throughput
• Rapid 'healing' of sub-surface damage (SSD) from prior processing steps
• Demonstrated surface quality:
  • Low surface roughness
  • No scratching or pitting

Compatible with various wafer types and faces

• Wafer diameters from 50 to 100 mm
• N-Type
  • On axis
  • 4 and 8 degree off axis
• P-Type
  • 8 degree off axis
• Semi Insulating
  • On axis
  • 8 degree off axis
• Si and C face