SiLECT^® EP4000 Series Slurries

Product Summary

The SiLECT EP4000 Series is Cabot Microelectronics' new fully formulated low-cost offering for Silicon Wafer Edge Polishing. They are high-purity colloidal silica slurries formulated for high removal rate, low edge roll off and significant reduction in cost of ownership through recycle stability.

• High Purity Colloidal Silica Slurry
• Colloidally Stable Concentrate
• Basic pH
• Shear Tolerant

Lower Cost-of-Ownership

• Formulated as a 20X (up to) concentrated slurry to reduce shipping and handling cost and to achieve lower point-of-use cost.
• Recyclable slurry that has consistent removal rate stability.
• Formulated to have an increase in removal rates to achieve high throughput.

Improved Device Reliability

• Exceeds industry standards for all metals including Cu and Ni.