SiLECT^® SP2000 Series Slurries

Product Summary

The SiLECT SP2000 Series is Cabot Microelectronics' new fully formulated low-cost suite of slurries for silicon wafer stock polishing. They are high-purity silica slurry formulations designed to reduce Cu levels, maximize removal rate but also provide excellent nanotopography and significantly reduce the cost of ownership.

• High-Purity Silica Slurry
• Colloidally Stable Concentrate
• Basic pH
• Shear Tolerant 

Improved Device Reliability

• >80% Reduction in Cu Level.
• Formulated with a Slurry Chelation Technology for Improved Wafer purity.

Lower Cost of Ownership

• Formulated as a 30X (upto) concentrated slurry to reduce shipping and handling cost and to achieve lower point-of-use cost.

Improvement in Product Yield

• Specially formulated to achieve superior nanotopography resulting in better product yield and to meet technical requirements for advance nodes.

Environmentally Friendly Formulation

• Contains low nitrogen content and is in compliance with local waste water treatment regulation.

Tunable Platform to Meet Customer Specific Requirements

• Tunable removal rate and nanotopography to meet customer specific requirements.