Discover Cabot Microelectronics


Cabot Microelectronics Corporation, headquartered in Aurora, Illinois, is the world's leading supplier of chemical mechanical planarization (CMP) polishing slurries used in semiconductor manufacturing, and second largest CMP pads supplier to the semiconductor industry. Our products play a critical role in the production of advanced semiconductor devices, helping to enable the manufacture of smaller, faster and more complex devices by our customers. Our mission is to create value by delivering high-performing and innovative solutions that solve our customers’ challenges.

COVID-19 UPDATE
In this dynamic environment related to the COVID-19 pandemic, CMC is focused on the health and safety of all CMC employees and their families and the communities in which we operate, while continuing to serve our global customer base.  CMC’s businesses, including its KMG Chemicals, Flowchem and Sealweld subsidiaries, supply critical and required chemistries, materials and services for “Essential Critical Infrastructure” sectors as defined by the U.S. Cybersecurity and Infrastructure Security Agency (CISA), including but not limited to the Chemical, Energy, Transportation and Communications and Information Technology sectors.  The published CISA guidance states that “[f]unctioning critical infrastructure is imperative during the response to the COVID-19 emergency for both public health and safety as well as community well-being. Certain critical infrastructure industries have a special responsibility in these times to continue operations.”  While local and state-level orders include more specific guidance for CMC’s businesses, each of CMC’s facilities continue in full operation as an essential business, and CMC continues its close partnership with its key suppliers also supporting these critical infrastructure industries.

For more information or questions, please contact Colleen Mumford, Vice President, Communications and Marketing, at 630-499-2600.

CMP Chemical Mechanical Planarization Slurry

CMP Slurries

As a pioneer in chemical mechanical planarization (CMP) slurries, Cabot Microelectronics commercialized our original Semi-Sperse™ products in the 1980s for 250nm applications.

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CMP Chemical Mechanical Planarization Polshing Pad

CMP Polishing Pads

Cabot Microelectronics’ Epic™ and NexPlanar® pads enable us to deliver a broad range of CMP polishing pad solutions, including performance-differentiated slurry and pad consumable sets.

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CMP Chemical Mechanical Planarization Best Practices

CMP Best Practices

As a proud partner to the semiconductor industry, Cabot Microelectronics is pleased to provide you with educational tools to help you optimize chemical mechanical planarization (CMP) process reliability and performance.

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