Discover Cabot Microelectronics

Cabot Microelectronics Corporation, headquartered in Aurora, Illinois, is the world's leading supplier of chemical mechanical planarization (CMP) polishing slurries used in semiconductor manufacturing, and second largest CMP pads supplier to the semiconductor industry. Our products play a critical role in the production of advanced semiconductor devices, helping to enable the manufacture of smaller, faster and more complex devices by our customers. Our mission is to create value by delivering high-performing and innovative solutions that solve our customers’ challenges.

CMP Chemical Mechanical Planarization Slurry

CMP Slurries

As a pioneer in chemical mechanical planarization (CMP) slurries, Cabot Microelectronics commercialized our original Semi-Sperse™ products in the 1980s for 250nm applications.

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CMP Chemical Mechanical Planarization Polshing Pad

CMP Polishing Pads

Cabot Microelectronics’ Epic™ and NexPlanar® pads enable us to deliver a broad range of CMP polishing pad solutions, including performance-differentiated slurry and pad consumable sets.

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CMP Chemical Mechanical Planarization Best Practices

CMP Best Practices

As a proud partner to the semiconductor industry, Cabot Microelectronics is pleased to provide you with educational tools to help you optimize chemical mechanical planarization (CMP) process reliability and performance.

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