Technical Resources

Chemical Mechanical Planarization Technical Resources

Our philosophy of working closely with our customers drives our sales and customer support operations and fuels our commitment to build and maintain customer partnerships throughout the world.

CMP Research and Development

Since its inception, Cabot Microelectronics has devoted significant resources to building a strong presence in the CMP – Chemical Mechanical Planarization market. Our efforts have yielded a solid foundation for growth that is supported by three cornerstones: excellent technology, world-class customer service and an extensive global infrastructure.

CMC’s technical staff has the knowledge and experience to help our customers solve complex issues related to the proper methods of mixing and handling cmp slurries.  We would like to be your trusted partner, so please contact us if you have a technical issue that you are unable to resolve.

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Explore CMC Best Practices Resources

Cabot Microelectronics is pleased to provide you with educational tools to help you optimize chemical mechanical planarization (CMP) process reliability and performance.  >> Learn More

CMP Process Fundamentals

by Professor Polish

  • Intro to Chip Manufacturing
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  • CMP Tools and Process
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  • CMP Slurries
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  • CMP Polishing Pads
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  • CMP Challenges and Summary
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  • CMP Process Fundamentals
    by Professor Polish