iDIEL D9228 CMP Slurry

A New Standard in Bulk Oxide Slurries.

Engineers at Cabot Microelectronics don’t just work for our customers – we work right alongside them. Your problems are our problems. Your goals are our goals. And for years, those goals have been simple and clear: Better performance. Fewer defects. Lower cost of ownership.

Now, with D9228, you can meet those goals. It’s time to raise the standard in bulk oxide CMP.

iDIEL D9228™ CMP Slurry

Our new iDIEL D9228 slurry is the next generation colloidal silica-based slurry for bulk oxide applications that utilizes proprietary, ultra-pure colloidal silica particles with precisely engineered surface chemistry.

FEATURES


Orange_Product_Arrow2 Proprietary, ultra-pure colloidal silica particles with precisely engineered surface chemistry

Orange_Product_Arrow2 Significant improvement in defectivity over traditional oxide slurry offerings

Orange_Product_Arrow2 Highly dilutable with POU solids ≤ 2%

Orange_Product_Arrow2 Improved rate and topography performance versus fumed silica with excellent process control capability

Orange_Product_Arrow2 Extendable to other traditional oxide niche applications, including Poly buff, STI buff, and W buff

Orange_Product_Arrow2 Stable, easy to use, with no agglomeration

BENEFITS


Orange_Product_Arrow2 Low defectivity levels ─ an order of magnitude lower defectivity vs. traditional fumed silica

Orange_Product_Arrow2 Significantly lower cost of ownership than current fumed and colloidal silica-based market offerings

Orange_Product_Arrow2 Improved rate and topography performance enables high throughput, tight process control and tunability

Orange_Product_Arrow2 Equivalent to better planarization efficiency as compared to SS25E