Tungsten W2000

Semi-SperseTM W2000 Tungsten Slurry

Production Proven. Industry Preferred.

Semi-Sperse W2000 Series is the industry benchmark for tungsten cmp. This production-proven, selective tungsten slurry is a high-purity slurry based on fumed silica and hydrogen peroxide technology.

Tungsten Slurry

A Safeguard for Your Success.

As the industry standard for tungsten slurry performance, Semi-Sperse W2000 delivers outstanding process reliability, consistency and supply assurance. You’ll discover these same performance benchmarks throughout our extensive portfolio of tungsten slurry offerings, from best-in-class W2000 to more advanced tungsten solutions designed for leading-edge semiconductor manufacturing.

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Trusted for Over 200 Million Liters

Cabot Microelectronics trusted for over 200 million liters of Semi-Sperse W2000 tungsten slurry provided to the semiconductor industry. We’ve reached this significant milestone because of our customers’ confidence in CMC as the industry leader in tungsten polishing solutions.

FEATURES & BENEFITS


Improvement in Product Yield

Orange_Product_Arrow2 Specially formulated high-purity slurry to achieve lower defectivity and excellent cleanability resulting in better product yield.

Lower Cost-of-Ownership

Orange_Product_Arrow2 Formulated as a 2x concentrated slurry to reduce shipping and handling cost and to achieve lower point-of-use cost.

Ease of Use

Orange_Product_Arrow2 Colloidally stable formulation that is easy to mix, filter and handle.