Archive for the Copper-Barrier-Aluminum Category

Novus™ A7100 Series Aluminum

Novus™ A7100 Series Aluminum

Novus™ A7100 Series Aluminum

  • Ultra Low Dishing
  • High Throughput for Al

Sentinel™ B8900 Series Barrier

Sentinel™ B8900 Series Barrier

Sentinel™ B8900 Series Barrier

  • Low Cost
  • High Throughput
  • Compatible with Different Dielectric Materials

i-Cue™ B7000 Series Barrier

i-Cue™ B7000 Series Barrier

i-Cue™ B7000 Series Barrier

  • Optimized Rs Performance
  • For Low k – ULK Device

Epoch™ C8900 Series Copper

Epoch™ C8900 Series Copper

Epoch™ C8900 Series Copper

  • Low Cost of Ownership
  • ULK Compatibility
  • Excellent OP Window
  • Ultra Low Dishing
  • High Throughput
  • Superior Defectivity