Archive for the Through Silicon Vias Category

Epoch™ TSV-N1000 Series for TSV Silicon Nitride Applications

Epoch™ TSV-N1000 Series for TSV Silicon Nitride Applications

Epoch™ TSV-N1000 Series for TSV Silicon Nitride Applications

  • High SiN Rate
  • High Ox Selectivity
  • Low Defectivity

Epoch™ TSV-D3000 Series for TSV Oxide Applications

Epoch™ TSV-D3000 Series for TSV Oxide Applications

Epoch™ TSV-D3000 Series for TSV Oxide Applications

  • High Oxide Rate
  • Tunable Cu Rate